Monolithic GaAs surface acoustic wave chemical microsensor array

Author

Hietala, V.M. ; Casalnuovo, S.A. ; Heller, E.J. ; Wendt, J.R. ; Frye-Mason, G.C. ; Baca, A.G.

Author_Institution

Sandia Nat. Labs., Albuquerque, NM, USA

Volume

3

fYear

2000

fDate

11-16 June 2000

Firstpage

1965

Abstract

A four-channel surface acoustic wave (SAW) chemical sensor array with associated RF electronics is monolithically integrated onto one GaAs IC. The sensor operates at 690 MHz from an on-chip SAW based oscillator and provides simple DC voltage outputs by using integrated phase detectors. This sensor array represents a significant advance in microsensor technology offering miniaturization, increased chemical selectivity, simplified system assembly, improved sensitivity, and inherent temperature compensation.

Keywords

Arrays; Chemical sensors; Compensation; Gallium arsenide; III-V semiconductors; Microsensors; Monolithic integrated circuits; Phase detectors; Surface acoustic wave sensors; 690 MHz; DC voltage outputs; GaAs; GaAs IC; RF electronics; chemical microsensor array; chemical selectivity; four-channel; integrated phase detectors; miniaturization; monolithic GaAs SAW microsensor array; monolithic integration; onchip SAW based oscillator; sensitivity; surface acoustic wave microsensor array; temperature compensation; Acoustic arrays; Acoustic sensors; Acoustic waves; Chemical sensors; Gallium arsenide; Microsensors; Phased arrays; Sensor arrays; Surface acoustic waves; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest. 2000 IEEE MTT-S International

Conference_Location

Boston, MA, USA

ISSN

0149-645X

Print_ISBN

0-7803-5687-X

Type

conf

DOI

10.1109/MWSYM.2000.862369

Filename

862369