DocumentCode
2328937
Title
Environmental Awareness In Semiconductor Manufacturing
Author
Ishii, Y.
Author_Institution
Environmental Policy Office, Hitachi, Ltd.
fYear
1994
fDate
21-22 June 1994
Firstpage
18
Lastpage
20
Abstract
World current for sustainable development is requiring environmentally sound production processes and products. Semi-conductor industry is high tech one. However, it consumes larger amount of resources than other industries. It is hoped that the semi-conductor industries will consider this point and make efforts to improve it in the same competitive way as their products performances.
Keywords
Conducting materials; Fabrication; Industrial waste; Investments; Production facilities; Raw materials; Research and development; Semiconductor device manufacture; Solvents; Waste reduction;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location
Tokyo, Japan
Type
conf
DOI
10.1109/ISSM.1994.729414
Filename
729414
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