Title :
Merits And Demerits Of Automation
Author_Institution :
Kitaitami Works, Mitsubisi Electric Corportion
Abstract :
Automation has been introduced into IC manufacturing line, based on the progression of manufacturing technology, so that the totally automated line can have been already realized. This cultivated experience showed several merits to us, but also indicated some needless demerits. This paper will discuss merits and demerits of automation on our results, and consider the future automation.
Keywords :
Automatic control; Computer aided instruction; Control systems; Magneto electrical resistivity imaging technique; Manufacturing automation; Process control; Production facilities; Production systems; Quality control; Vehicles;
Conference_Titel :
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location :
Tokyo, Japan
DOI :
10.1109/ISSM.1994.729416
