DocumentCode
2329223
Title
A TPM-Inspired Factory Throughput Analysis Tool
Author
Konopka, J.
Author_Institution
SEMATECH
fYear
1994
fDate
21-22 June 1994
Firstpage
64
Lastpage
67
Abstract
The throughput of a factory is constrained by its bottleneck tools. TPM is a methodology that can be used to improve the efficiencies and thus the throughputs of these bottleneck tools. CUBES is a model that helps identify where improvements can be made and how much benefit can be gained from each improvement. If all bottlenecks are analyzed together, factory level throughput improvements can be made.
Keywords
Availability; Circuits; Costs; Electronics industry; Manufacturing industries; Particle measurements; Production facilities; Robustness; Semiconductor device manufacture; Throughput;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location
Tokyo, Japan
Type
conf
DOI
10.1109/ISSM.1994.729425
Filename
729425
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