DocumentCode
2329584
Title
A Proposal For The Corrosive Gas Distribution System
Author
Ozawa, E.
Author_Institution
Air Liquide Laboratories
fYear
1994
fDate
21-22 June 1994
Firstpage
165
Lastpage
168
Abstract
Each failure has a unique cause. Main causes of failures in corrosive gas line are human error in gas handing, bad function of pressure regulator due to corrosion and the corrosion of materials around welding sites. If these problems can be eliminated from the corrosive gas line, we will be able to realize much safer and higher-quality gas line. Establishment of good purging procedure, the usage of low Mn 316L, local usage of high corrosion resistant materials like Hastelloy etc. are the suitable and cost effective counterplan for corrosion problems.
Keywords
Corrosion; Humans; Immune system; Moisture; Proposals; Regulators; Semiconductor materials; Surface resistance; Valves; Welding;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location
Tokyo, Japan
Type
conf
DOI
10.1109/ISSM.1994.729446
Filename
729446
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