DocumentCode
2329614
Title
Minienvironment Technology And Automation Systems For Next Generation IC Fabs
Author
Brain, M. ; Abuzeid, S.
Author_Institution
Asyst Technologies, Inc.
fYear
1994
fDate
21-22 June 1994
Firstpage
173
Lastpage
178
Abstract
The integration of Minienvironment and SMIF Systems into IC fabrication provides new automation requirements and design possibilities. A scenario for an optimized, integrated Minienvironment and SMIF-based Automated facility is described and the benefits are analyzed. Recent data is presented comparing particulate contamination within various conventional open and minienvironment-based facilities worldwide.
Keywords
Automatic control; Control systems; Costs; Design automation; Manufacturing automation; Material storage; Particle measurements; Pollution measurement; Storage automation; Surface contamination;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location
Tokyo, Japan
Type
conf
DOI
10.1109/ISSM.1994.729448
Filename
729448
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