Development Of A Highly Efficient Fan Filter System For Clean Rooms

Recently in the semiconductor IC production, the investment and the running cost of a clean room air conditioning system have been increasing in proportion to enlarging the production scale. The above investment in it occupies 20% of it in the plant investment and the running cost reaches 45% cost of the plant running cost. These are in the considerable ratio of the IC manufacturing cost. Under the above situation, to reduce the investment and the running cost of it can make a great deal of profit as much as cost reductions of production equipments and others. To accomplish the above reductions of the clean room air conditioning system, the low cost and the highly efficient fan filter system has been developed by authors.