Dual loop iterative learning control for macro-micro driving systems

A dual loop iterative learning control method is presented for macro-micro dual actuator driving systems. As the model and coupling effects of the macro-micro motion system are analyzed, the dual loop macro-micro control structure is employed to attenuate the coupling effects. In addition, dual loop iterative learning control is employed based on the above structure. Then tracking errors of the micro motion system and macro-micro relative displacements are learned to improve tracking performance of the micro motion stage and decrease the macro-micro relative displacement. Finally convergence of the iterative learning control system is analyzed. The proposed method is applied to the macro-micro test bench, which is used to validate effectiveness of the method.