DocumentCode
2330344
Title
Ultra-thin chips and related applications, a new paradigm in silicon technology
Author
Burghartz, Joachim N. ; Appel, Wolfgang ; Harendt, Christine ; Rempp, Horst ; Richter, Harald ; Zimmermann, Martin
Author_Institution
Inst. fur Mikroelektron. Stuttgart (IMS CHIPS), Stuttgart, Germany
fYear
2009
fDate
14-18 Sept. 2009
Firstpage
28
Lastpage
35
Abstract
Ultra-thin chip technology has potential to provide solutions for overcoming bottlenecks in silicon technology and for leading to new applications. This, however, requires new techniques in fabricating very thin wafers or chips, in applying them to device integration processes and in assembly and packaging. Therefore, ultra-thin chips and the related applications represent a new paradigm in silicon technology. The paper highlights the prominent applications of ultra-thin chips, alerts to the related technological issues and compares the candidate enabling technologies.
Keywords
elemental semiconductors; monolithic integrated circuits; semiconductor technology; semiconductor thin films; silicon; thin film circuits; Si; silicon technology; thin wafer fabrication; ultrathin chip technology; Assembly; Endoscopes; Implants; Mechanical factors; Packaging; Paper technology; Power dissipation; Retina; Security; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
ESSCIRC, 2009. ESSCIRC '09. Proceedings of
Conference_Location
Athens
ISSN
1930-8833
Print_ISBN
978-1-4244-4354-3
Type
conf
DOI
10.1109/ESSCIRC.2009.5326011
Filename
5326011
Link To Document