Title :
Carbon thin films deposition by KrF Pulsed Laser at different temperatures
Author :
Qindeel, Rabia ; Chaudhary, Kashif Tufail ; Hussain, Muhammad Sakhawat ; Ali, J.B.
Author_Institution :
Dept. of Phys., Univ. Teknol. Malaysia, Johor Bahru, Malaysia
Abstract :
In this paper, carbon thin films were prepared by KrF pulsed laser deposition at 20 °C and 300 °C. The surface morphology were characterized by atomic force microscopy (AFM). The nature of bonding of carbon thin films deposited at different temperatures has been done by using technique Fourier infrared transformation spectroscopy (FTIR).
Keywords :
Fourier transform spectra; atomic force microscopy; carbon; infrared spectra; pulsed laser deposition; surface morphology; thin films; AFM; C; FTIR; Fourier infrared transformation spectroscopy; atomic force microscopy; carbon thin films; pulsed laser deposition; surface morphology; temperature 20 degC; temperature 300 degC;
Conference_Titel :
Enabling Science and Nanotechnology (ESciNano), 2010 International Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4244-8853-7
DOI :
10.1109/ESCINANO.2010.5700932
