• DocumentCode
    2332210
  • Title

    Morphological and optical characteristics of porous silicon structure formed by electrochemical etching

  • Author

    Astuti, B. ; Rusli, N.I. ; Hashim, A.M. ; Othaman, Z. ; Nafarizal, N. ; Ali, N.K. ; Safri, N.M.

  • Author_Institution
    Mater. Innovations & Nanoelectron. Res. Group, Univ. Teknol. Malaysia, Skudai, Malaysia
  • fYear
    2010
  • fDate
    1-3 Dec. 2010
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    Porous silicon (PS) is defined as a composition of a silicon skeleton permeated by a network of pores or in other word, PS is a network of silicon nanowires and nanoholes which are formed when the crystalline silicon wafers are etched electrochemically in electrolyte solution such as hydrofluoric (HF) acid . PS shows different features in comparison to the bulk silicon such as shifting of fundamental absorption edge into the short wavelength and photoluminescence visible region. The PS material possesses interesting characteristics such as larger surface to volume ratio, high-intensity of nano porous structure and low refractive index. This paper presents the synthesis and characterization of electrochemically anodized PS structures. The effect of short anodization time on the PS structures is investigated. The PS surface morphology and optical properties are characterized using scanning electron microscopy (SEM) and photoluminescence (PL) spectrometer, respectively.
  • Keywords
    anodisation; elemental semiconductors; etching; photoluminescence; porous semiconductors; scanning electron microscopy; silicon; surface morphology; Si; electrochemical anodization; electrochemical etching; morphological characteristics; optical characteristics; photoluminescence; porous silicon structure; scanning electron microscopy; surface morphology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Enabling Science and Nanotechnology (ESciNano), 2010 International Conference on
  • Conference_Location
    Kuala Lumpur
  • Print_ISBN
    978-1-4244-8853-7
  • Type

    conf

  • DOI
    10.1109/ESCINANO.2010.5700973
  • Filename
    5700973