Title :
Rf Discharge Current And Voltage Measurements and Comparison to an Analytical Model
Author :
Sato, A.H. ; Lieberman, M.A.
Author_Institution :
University of California
Keywords :
Analytical models; Current measurement; Electric variables measurement; Electrodes; Electrons; Physics; Power measurement; Predictive models; Radio frequency; Voltage measurement;
Conference_Titel :
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location :
Williamsburg, VA, USA
Print_ISBN :
0-7803-0147-1
DOI :
10.1109/PLASMA.1991.695746
