• DocumentCode
    2332836
  • Title

    Rf Discharge Current And Voltage Measurements and Comparison to an Analytical Model

  • Author

    Sato, A.H. ; Lieberman, M.A.

  • Author_Institution
    University of California
  • fYear
    1991
  • fDate
    3-5 June 1991
  • Firstpage
    196
  • Lastpage
    196
  • Keywords
    Analytical models; Current measurement; Electric variables measurement; Electrodes; Electrons; Physics; Power measurement; Predictive models; Radio frequency; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
  • Conference_Location
    Williamsburg, VA, USA
  • Print_ISBN
    0-7803-0147-1
  • Type

    conf

  • DOI
    10.1109/PLASMA.1991.695746
  • Filename
    695746
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2332836