Title :
Heating By RF Sheaths in Capacitive Discharges
Author :
Wood, B.P. ; Lieberman, M.A. ; Lichtenberg, A.J.
Author_Institution :
University of California
Keywords :
Cathodes; Electrons; Heating; Magnetic confinement; Magnetic fields; Plasma applications; Plasma confinement; Plasma sources; Radio frequency; Stochastic processes;
Conference_Titel :
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location :
Williamsburg, VA, USA
Print_ISBN :
0-7803-0147-1
DOI :
10.1109/PLASMA.1991.695747
