DocumentCode :
2333061
Title :
Effects of spin coating speed on nanostructured Titanium Dioxide thin films properties
Author :
Zahidi, Musa Mohamed ; Malek, Mohd Firdaus ; Mamat, Mohamad Hafiz ; Rashied, Norulhuda Abd ; Noor, Uzer Mohd ; Bin Mahmood, Mohamad Rusop
Author_Institution :
Univ. Technol. MARA, Shah Alam, Malaysia
fYear :
2010
fDate :
1-3 Dec. 2010
Firstpage :
1
Lastpage :
2
Abstract :
This work aims to understand the effects of spin coating speed to the structural and optical properties of TiO2 thin films for dynamic dispense method. Film thickness is measured at three different points and the average is taken. At the lowest spin speed (2000 rpm), the resulting thin films average thickness is 187.8 nm. With the increment of spin speed, the film´s thickness decrease almost linearly which agrees with the result reported by Dewi et al [1]. As the spin speed increases, the centrifugal force will cause more TiO2 particle to be thrown away from the substrate thus leaving only thinner film. The higher spin speed cause smaller TiO2 particle to be removed from the substrate, leaving only larger particle which causes higher surface roughness, that eventually leads to lower optical transmittance.
Keywords :
nanofabrication; nanoparticles; semiconductor growth; semiconductor thin films; spin coating; surface roughness; titanium compounds; ultraviolet spectra; visible spectra; wide band gap semiconductors; TiO2; UV-vis spectroscopy; centrifugal force; dynamic dispense method; nanostructured titanium dioxide thin films properties; optical properties; optical transmittance; spin coating speed effects; surface roughness; titanium dioxide particle;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Enabling Science and Nanotechnology (ESciNano), 2010 International Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4244-8853-7
Type :
conf
DOI :
10.1109/ESCINANO.2010.5701016
Filename :
5701016
Link To Document :
بازگشت