DocumentCode :
2333079
Title :
Electrical and optical properties of nanostructured zinc oxide thin films via sol-gel coating
Author :
Bin Malek, Mohd Firdaus ; Zahidi, Musa Bin Mohamed ; Mamat, H.B. ; Bin Sahdan, Zainizan ; Binti Khusaimi, Zuraida ; Bin Mahmood, Mohamad Rusop
Author_Institution :
NANO-Electron. Centre, Univ. Technol. MARA, Shah Alam, Malaysia
fYear :
2010
fDate :
1-3 Dec. 2010
Firstpage :
1
Lastpage :
1
Abstract :
ZnO thin films were fabricated on glass substrate by sol-gel method. A stable and homogeneous solution was prepared by dissolving zinc acetate dehydrate as a starting material in a solution of 2-methoxyethanol and monoethanolamine (MEA). The precursor concentration was selected as the parameter to optimize the thin films quality. The molar ratio of zinc acetate dehydrate was kept at 1. The thin films were preheated at 300°C for 10 minutes after each coating. After depositing all layers, the thin films are annealed for 1 hour in order to obtain transparent ZnO thin films. It was found that the precursor concentration affect the IV characteristic, transmittance, and the thickness of the resultant ZnO thin films.
Keywords :
II-VI semiconductors; annealing; electrical resistivity; infrared spectra; semiconductor growth; semiconductor thin films; sol-gel processing; ultraviolet spectra; visible spectra; wide band gap semiconductors; zinc compounds; SiO2; ZnO; annealing; electrical properties; electrical resistivity; homogeneous solution; optical properties; optical transmittance spectra; sol-gel method; temperature 300 degC; time 1 hour; time 10 min; transparent thin films;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Enabling Science and Nanotechnology (ESciNano), 2010 International Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4244-8853-7
Type :
conf
DOI :
10.1109/ESCINANO.2010.5701017
Filename :
5701017
Link To Document :
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