• DocumentCode
    2333079
  • Title

    Electrical and optical properties of nanostructured zinc oxide thin films via sol-gel coating

  • Author

    Bin Malek, Mohd Firdaus ; Zahidi, Musa Bin Mohamed ; Mamat, H.B. ; Bin Sahdan, Zainizan ; Binti Khusaimi, Zuraida ; Bin Mahmood, Mohamad Rusop

  • Author_Institution
    NANO-Electron. Centre, Univ. Technol. MARA, Shah Alam, Malaysia
  • fYear
    2010
  • fDate
    1-3 Dec. 2010
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    ZnO thin films were fabricated on glass substrate by sol-gel method. A stable and homogeneous solution was prepared by dissolving zinc acetate dehydrate as a starting material in a solution of 2-methoxyethanol and monoethanolamine (MEA). The precursor concentration was selected as the parameter to optimize the thin films quality. The molar ratio of zinc acetate dehydrate was kept at 1. The thin films were preheated at 300°C for 10 minutes after each coating. After depositing all layers, the thin films are annealed for 1 hour in order to obtain transparent ZnO thin films. It was found that the precursor concentration affect the IV characteristic, transmittance, and the thickness of the resultant ZnO thin films.
  • Keywords
    II-VI semiconductors; annealing; electrical resistivity; infrared spectra; semiconductor growth; semiconductor thin films; sol-gel processing; ultraviolet spectra; visible spectra; wide band gap semiconductors; zinc compounds; SiO2; ZnO; annealing; electrical properties; electrical resistivity; homogeneous solution; optical properties; optical transmittance spectra; sol-gel method; temperature 300 degC; time 1 hour; time 10 min; transparent thin films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Enabling Science and Nanotechnology (ESciNano), 2010 International Conference on
  • Conference_Location
    Kuala Lumpur
  • Print_ISBN
    978-1-4244-8853-7
  • Type

    conf

  • DOI
    10.1109/ESCINANO.2010.5701017
  • Filename
    5701017