• DocumentCode
    2333219
  • Title

    Direct linear drives for the application in high vacuum

  • Author

    Budig, Peter- Klaus

  • Author_Institution
    EAAT GmbH Chemnitz, Annaberger Str. 231, G - 09120 (Germany)
  • fYear
    2008
  • fDate
    11-13 June 2008
  • Firstpage
    147
  • Lastpage
    154
  • Abstract
    High-vacuum application demands for clean- room conditions. Therefore there is no chance to use roller bearings, air- cushion bearings or even slide bearings. On the other side making motion must be made without mechanical contact f.i. as in a rail- wheel system or similar. Therefore a design was chosen with a permanent magnetic bearing and a linear- drive system.
  • Keywords
    Automation; Coils; Electromagnetic forces; Magnetic fields; Magnetic levitation; Permanent magnets; Power electronics; Power supplies; Rolling bearings; Wheels; Linear drive;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Power Electronics, Electrical Drives, Automation and Motion, 2008. SPEEDAM 2008. International Symposium on
  • Conference_Location
    Ischia, Italy
  • Print_ISBN
    978-1-4244-1663-9
  • Electronic_ISBN
    978-1-4244-1664-6
  • Type

    conf

  • DOI
    10.1109/SPEEDHAM.2008.4581208
  • Filename
    4581208