Design, simulation and fabrication of a hollow core ARROW waveguide in glass substrate for optofluidic applications

Author

Melo, E.G. ; Abe, I.Y. ; Alvarado, M.A. ; Carreno, Marcelo Nelson Paez ; Alayo, M.I.

Author_Institution

Electron. Syst. Eng. Dept. (PSI), Univ. of Sao Paulo, Sao Paulo, Brazil

fYear

2014

fDate

2-4 April 2014

Firstpage

1

Lastpage

6

Abstract

The antiresonant reflecting optical waveguide (ARROW) with hollow core and liquid core are one of the most promising technologies in Lab-on-a-Chips and optofluidic research. Motivated by this, in this paper we present the design, simulation and fabrication processes of hollow core ARROW built in Corning glass substrates and utilizing Si₃N₄/SiO₂ PECVD antiresonant reflecting multilayer films on the channel wall. Details about the TMM/FDM methodology developed for the simple and fast design of ARROW waveguides built with multilayer dielectric thin films deposited over rounded microchannels in glass substrates are exhibited. The preliminary results confirm the light confinement in the hollow core region of the fabricated waveguide structure but further experiment are needed to fully characterize the devices.

Keywords

antireflection coatings; dielectric thin films; finite difference methods; fluidic devices; micro-optics; microchannel flow; microfabrication; optical design techniques; optical fabrication; optical multilayers; optical waveguides; silicon compounds; FDM methodology; PECVD antiresonant reflecting multilayer films; Si₃N₄-SiO₂; TMM methodology; antiresonant reflecting optical waveguide; finite difference method; glass substrate; hollow core ARROW waveguide design; hollow core ARROW waveguide fabrication; hollow core ARROW waveguide simulation; lab-on-a-chips; light confinement; multilayer dielectric thin film deposition; optofluidic applications; rounded microchannels; transfer matrix method; Fabrication; Glass; Mathematical model; Optical waveguides; Propagation losses; Refractive index; Substrates; Glass; HC-ARROW; Optofluidic; TMM;

fLanguage

English

Publisher

ieee

Conference_Titel

Devices, Circuits and Systems (ICCDCS), 2014 International Caribbean Conference on

Conference_Location

Playa del Carmen

Print_ISBN

978-1-4799-4684-6

Type

conf

DOI

10.1109/ICCDCS.2014.7016174

Filename

7016174