Title :
IWSM. 1998 3rd International Workshop on Statistical Metrology (Cat. No.98EX113)
Abstract :
The following topics were dealt with: statistical TCAD; defect metrology; yield; design with variability; and variability modelling
Keywords :
design for manufacture; integrated circuit measurement; integrated circuit yield; technology CAD (electronics); defect metrology; design with variability; statistical TCAD; variability modelling; yield;
Conference_Titel :
Statistical Metrology, 1998. 3rd International Workshop on
Conference_Location :
Honolulu, HI, USA
Print_ISBN :
0-7803-4338-7
DOI :
10.1109/IWSTM.1998.729751
