Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

Author

Matsui, Shinji

Author_Institution

Lab. of Adv. Sci. & Technol. for Ind., Univ. of Hyogo, Kamigori, Japan

fYear

2010

fDate

1-3 Dec. 2010

Firstpage

1

Lastpage

1

Abstract

Three-dimensional nanostructure fabrication has been demonstrated by 30 keV Ga⁺ focused-ion-beam chemical-vapor-deposition (FIB-CVD) using a phenanthrene (C,4Hι0) source as a precursor. Microstructure plastic arts is advocated as a new field using micro-beam technology, presenting one example of micro-wine-glass with 2.75μm external diameter and 12μm height. The deposition film is a diamondlike amorphous carbon. A large Young´s modulus that exceeds 600 GPa seems to present great possibilities for various applications. Producing of threedimensional nanostructure is discussed. Micro-coil, nanoelectrostatic actuator, and nano-spacewiring with 0.1 μm dimension are demonstrated as parts of nanomechanical system. Furthermore, nanoinjector and nanomanipulator are also fabricated as a novel nano-tool for manipulation and analysis of subcellular organelles.

Keywords

Young´s modulus; amorphous state; cellular biophysics; chemical vapour deposition; diamond-like carbon; electrostatic actuators; focused ion beam technology; manipulators; nanoelectromechanical devices; nanofabrication; C; Young´s modulus; diamondlike amorphous carbon; electron volt energy 30 keV; focused-ion-beam chemical vapor deposition; microcoil; nanoelectrostatic actuator; nanoinjector; nanomanipulator; nanomechanical system; nanospace wiring; phenanthrene; size 12 mum; size 2.75 mum; subcellular organelles; three-dimensional nanostructure fabrication;

fLanguage

English

Publisher

ieee

Conference_Titel

Enabling Science and Nanotechnology (ESciNano), 2010 International Conference on

Conference_Location

Kuala Lumpur

Print_ISBN

978-1-4244-8853-7

Type

conf

DOI

10.1109/ESCINANO.2010.5701092

Filename

5701092