DocumentCode
233617
Title
The performance simulation of a novel SAW pressure sensor
Author
Wang Xiaobo ; Li Juelong ; Xing Jianchun ; Xie Liqiang ; Kang Shuai
Author_Institution
Coll. of Defense Eng., PLA Univ. of Sci. & Technol., Nanjing, China
fYear
2014
fDate
28-30 July 2014
Firstpage
461
Lastpage
466
Abstract
In order to solve the problems of complicated wiring and inconvenient operation existing in traditional pressure sensor, based on the surface acoustic wave (SAW) theory, a wireless passive pressure sensor with hollow cylinder sealing beam structure is designed in this paper. The sensor is resistant to electromagnetic interference, and the temperature compensation is adopted to obtain the strain that the pressure causes exactly. In addition, the mechanical properties analysis and finite element simulation analysis about the structure is done to verify its effectiveness in this paper. Based on the principle of SAW, this sensor can form a complete sense of passive wireless sensor system. Compared to traditional pressure sensor, the sensor designed in this paper has a high accuracy and application flexibility.
Keywords
compensation; electromagnetic interference; finite element analysis; internal stresses; pressure sensors; surface acoustic wave sensors; SAW pressure sensor; electromagnetic interference; finite element simulation; hollow cylinder sealing beam structure; mechanical properties; performance simulation; strain; surface acoustic wave theory; temperature compensation; wireless passive pressure sensor; Delays; Strain; Substrates; Surface acoustic waves; Temperature; Temperature measurement; Temperature sensors; Finite Element Simulation; Pressure Sensor; Surface Acoustic Wave (SAW); Wireless Passive;
fLanguage
English
Publisher
ieee
Conference_Titel
Control Conference (CCC), 2014 33rd Chinese
Conference_Location
Nanjing
Type
conf
DOI
10.1109/ChiCC.2014.6896667
Filename
6896667
Link To Document