DocumentCode :
233617
Title :
The performance simulation of a novel SAW pressure sensor
Author :
Wang Xiaobo ; Li Juelong ; Xing Jianchun ; Xie Liqiang ; Kang Shuai
Author_Institution :
Coll. of Defense Eng., PLA Univ. of Sci. & Technol., Nanjing, China
fYear :
2014
fDate :
28-30 July 2014
Firstpage :
461
Lastpage :
466
Abstract :
In order to solve the problems of complicated wiring and inconvenient operation existing in traditional pressure sensor, based on the surface acoustic wave (SAW) theory, a wireless passive pressure sensor with hollow cylinder sealing beam structure is designed in this paper. The sensor is resistant to electromagnetic interference, and the temperature compensation is adopted to obtain the strain that the pressure causes exactly. In addition, the mechanical properties analysis and finite element simulation analysis about the structure is done to verify its effectiveness in this paper. Based on the principle of SAW, this sensor can form a complete sense of passive wireless sensor system. Compared to traditional pressure sensor, the sensor designed in this paper has a high accuracy and application flexibility.
Keywords :
compensation; electromagnetic interference; finite element analysis; internal stresses; pressure sensors; surface acoustic wave sensors; SAW pressure sensor; electromagnetic interference; finite element simulation; hollow cylinder sealing beam structure; mechanical properties; performance simulation; strain; surface acoustic wave theory; temperature compensation; wireless passive pressure sensor; Delays; Strain; Substrates; Surface acoustic waves; Temperature; Temperature measurement; Temperature sensors; Finite Element Simulation; Pressure Sensor; Surface Acoustic Wave (SAW); Wireless Passive;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Control Conference (CCC), 2014 33rd Chinese
Conference_Location :
Nanjing
Type :
conf
DOI :
10.1109/ChiCC.2014.6896667
Filename :
6896667
Link To Document :
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