DocumentCode
2336181
Title
Digest of Papers. Microprocesses and Nanotechnology´98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)
fYear
1998
fDate
13-16 July 1998
Abstract
Presents the front cover of the proceedings.
Keywords
X-ray lithography; coating techniques; electron beam lithography; etching; inspection; ion beam lithography; micromechanical devices; nanotechnology; photolithography; radiation effects; resists; ultraviolet lithography; vacuum microelectronics; vapour deposition; EUV lithography; X-ray lithography; beam induced reaction; deposition; electron ion beam lithography; etching; field emitters; inspection; ion beam lithography; metrology; microprocesses; microsystems; nanodevices; nanofabrication; nanotechnology; optical lithography; resists;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location
Kyoungju, South Korea
Print_ISBN
4-930813-83-2
Type
conf
DOI
10.1109/IMNC.1998.729891
Filename
729891
Link To Document