Thick film strain gauges on insulated metal substrates for high sensitivity mechanical sensors

Author

Marioli, D. ; Rolla, P. ; Taroni, A.

Author_Institution

Dept. of Electron. for Autom., Brescia Univ., Italy

fYear

1994

fDate

10-12 May 1994

Firstpage

1245

Abstract

New thick film (TF) pastes have been tested on unconventional metal substrates for applications in sensor manufacturing. The good elastic properties of selected metals and alloys can improve TF transducer sensitivity. The compatibility of metal substrates and pastes with respect to TF technology has been characterized. Various systems have been tested with regard to the adhesion and to the dielectric surface condition; strain gauges have been printed and fired on the obtained insulated substrates and data on the measured values of some electrical parameters such as the sheet resistance value, the temperature coefficient of resistance (TCR), the gauge factor (GF) are reported

Keywords

electric sensing devices; metals; sensitivity; strain gauges; substrates; thick film circuits; thick film devices; alloys; compatibility; elastic properties; gauge factor; high sensitivity mechanical sensors; insulated metal substrates; metal substrates; metals; sensitivity; sensor manufacturing; strain gauges have; temperature coefficient of resistance; thick film strain gauges; Capacitive sensors; Dielectric substrates; Electric resistance; Insulation; Sensor phenomena and characterization; Strain measurement; Surface resistance; Testing; Thick film sensors; Thick films;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 1994. IMTC/94. Conference Proceedings. 10th Anniversary. Advanced Technologies in I & M., 1994 IEEE

Conference_Location

Hamamatsu

Print_ISBN

0-7803-1880-3

Type

conf

DOI

10.1109/IMTC.1994.351830

Filename

351830