Development of very small differential pressure transmitter

This paper describes development of very small intelligent differential pressure transmitter using semiconductor multiple pressure sensor. The study focuses on the structural design, system and compensation algorithms to achieve the compact. A very small semiconductor pressure sensor based on piezoresistive gauge placed in the small sensing body converts three quantities to electric signal. The structural and response analysis of the sensing body to achieve the compact has been studied. The microprocessing unit compensates the output of transmitter of refering the three signal to calibration data and does it´s self-diagnosis included the damage of sensor and sensing body