Designing method for sensing body mechanism of differential pressure transmitter using silicon diaphragm type pressure sensor

Author

Matsuoka, O.Y. ; Yamamoto, Y. ; Tobita, T. ; Shimada, S. ; Yasukawa, A.

Author_Institution

Instrum. Div., Hitachi Ltd., Katsuta, Japan

fYear

1994

fDate

10-12 May 1994

Firstpage

1229

Abstract

This paper describes a designing method of the three-diaphragm type sensing body of differential pressure transmitter for protecting silicon diaphragm type pressure sensor from an over-pressure. This method includes how to decide each stiffness of three metal diaphragms and liquid quantity filled in the sensing body. This method is applied to differential pressure transmitters with measuring ranges from 0-0.6 kPa to 0-400 kPa. As a result, transmitters with significant stabilities are obtained: a zero and span influence of a static pressure and an over-pressure are less than 0.2% at a line pressure of 15 MPa

Keywords

electric sensing devices; elemental semiconductors; high-pressure techniques; pressure measurement; pressure sensors; silicon; 0 to 0.6 kPa; 0 to 400 kPa; 15 MPa; Si; Si diaphragm pressure sensor; differential pressure transmitter; differential pressure transmitters; metal diaphragms; over-pressure protection; sensing body mechanism; static pressure an; three-diaphragm sensor; Design methodology; Instruments; Mechanical sensors; Pressure measurement; Protection; Seals; Sensor phenomena and characterization; Silicon; Springs; Transmitters;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 1994. IMTC/94. Conference Proceedings. 10th Anniversary. Advanced Technologies in I & M., 1994 IEEE

Conference_Location

Hamamatsu

Print_ISBN

0-7803-1880-3

Type

conf

DOI

10.1109/IMTC.1994.351834

Filename

351834