Title :
The Simulation Of A Low Pressure Argon RF Glow Discharge Using A Self-consistent Particle Model
Author :
Trombley, H.W. ; Terry, F.L. ; Elta, M.E.
Author_Institution :
University of Michigan
Keywords :
Argon; Circuit simulation; Electron emission; Glow discharges; Integrated circuit modeling; Laboratories; Monte Carlo methods; Radio frequency; Solid modeling; Solid state circuits;
Conference_Titel :
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location :
Williamsburg, VA, USA
Print_ISBN :
0-7803-0147-1
DOI :
10.1109/PLASMA.1991.695782
