• DocumentCode
    2337163
  • Title

    The Simulation Of A Low Pressure Argon RF Glow Discharge Using A Self-consistent Particle Model

  • Author

    Trombley, H.W. ; Terry, F.L. ; Elta, M.E.

  • Author_Institution
    University of Michigan
  • fYear
    1991
  • fDate
    3-5 June 1991
  • Firstpage
    210
  • Lastpage
    210
  • Keywords
    Argon; Circuit simulation; Electron emission; Glow discharges; Integrated circuit modeling; Laboratories; Monte Carlo methods; Radio frequency; Solid modeling; Solid state circuits;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
  • Conference_Location
    Williamsburg, VA, USA
  • Print_ISBN
    0-7803-0147-1
  • Type

    conf

  • DOI
    10.1109/PLASMA.1991.695782
  • Filename
    695782
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2337163