Title :
Silicon microstructures and microactuators for compact computer disk drives
Author :
Miu, Denny K. ; Tai, Yu-Chong
Author_Institution :
Dept. of Mech. Eng., California Univ., Los Angeles, CA, USA
Abstract :
Silicon micromachining techniques offer many exciting opportunities for fabricating both passive microstructures and active electromagnetic microactuators for significant form factor reduction and increase in recording density of future magnetic recording rigid disk drives. In this overview paper, the authors have presented some recent results and novel product concepts
Keywords :
digital magnetic recording; elemental semiconductors; hard discs; microactuators; micromachining; position control; silicon; Si; active electromagnetic microactuators; compact computer disk drives; magnetic recording rigid disk drives; microactuators; passive microstructures; recording density; silicon micromachining techniques; silicon microstructures; Digital magnetic recording; Disk drives; Fabrication; Magnetic heads; Magnetic recording; Microactuators; Micromachining; Microstructure; Optical recording; Silicon;
Conference_Titel :
American Control Conference, Proceedings of the 1995
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-2445-5
DOI :
10.1109/ACC.1995.532710
