Title :
Particle analyzer system
Author :
Takahara, Hisao ; Asano, Kiyoshi ; Iwasaki, Motoaki ; Takamatsu, Yukihiko ; Tanibata, Yasuhiro ; Suzuki, Toshiyuki
Author_Institution :
Yokogawa Electr. Corp., Musashino, Japan
Abstract :
We have developed, a new particle analyzing system, the PT1000, the world´s first such system based on microwave-induced plasma (MIP) technology. This system provides three-dimensional information: the composition and size of each particulate, and their number and distribution. The measuring principle is that particulates collected on the filter are introduced in turn into the center of the high temperature, atmospheric pressure He-MIP by an aspirator, evaporated instantaneously and atomized, ionized, then further excited. The emission spectrum accompanying this excitation enters four spectroscopes through optical fibers. Elements in the particulates are determined from the wave lengths set on the spectroscopes, the number of particulates from the number of peaks, the particle size from the peak height, and the composition from the synchronizing emission
Keywords :
clean rooms; helium; optical fibres; particle size measurement; plasma applications; spectrochemical analysis; spectroscopy; He; PT1000; VLSI; atmospheric pressure; bar graphs; clean rooms; emission spectrometric system; emission spectrum; microwave-induced plasma; optical fibers; particle analyzer; particle size; sample analysis; synchronizing emission; three-dimensional information; Atmospheric measurements; Atmospheric-pressure plasmas; Atomic measurements; Microwave technology; Optical fiber filters; Particle measurements; Plasma measurements; Plasma temperature; Pressure measurement; Spectroscopy;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 1994. IMTC/94. Conference Proceedings. 10th Anniversary. Advanced Technologies in I & M., 1994 IEEE
Conference_Location :
Hamamatsu
Print_ISBN :
0-7803-1880-3
DOI :
10.1109/IMTC.1994.351980