Multiscale deconvolution using wavelet transform for improving the depth resolution in secondary ion mass spectrometry analysis

In this paper multiscale deconvolution scheme, based on Tikhonov-Miller regularization and wavelets transformation, was developed and applied to improve the depth resolution of secondary ion mass spectrometry (SIMS) analysis. Both local applying of the regularization parameter and shrinking the wavelet coefficients of blurred and estimated solutions at each resolution level in the multiscale deconvolution provide to smoothed results without the risk of generating spurious oscillations related to noise content in the profile. This, leads to a significant improvement of the depth resolution. The results obtained by using multiscale deconvolution are compared to those obtained by mono resolution deconvolution method which is Tikhonov-Miller regularization with a model of solution. The advantages of multiresolution deconvolution are presented and discussed.