Title :
A new technique for optical 3D measurements with a confocal scanning laser microscope
Author_Institution :
Lasertec Corp., Yokohama, Japan
Abstract :
The scanning laser confocal microscope has been established as a tool for 3D measurement. However the nanometric measurement in z direction had been difficult. The new technique, combination a Miraw objective lens with a confocal microscope, opens up new surface metrology. This technique does not sacrifice any merits of confocal microscope, quick measurement, twice the bandwidth, high contrast and scatter free imaging
Keywords :
light interferometry; measurement by laser beam; optical microscopes; optical microscopy; surface topography measurement; 3D measurement; Miraw objective lens; calibration; confocal scanning laser microscope; interferometer; nanometric measurement; optical 3D measurement; optical profilometer; stylus profilometer; surface metrology; z direction; Apertures; Bandwidth; Detectors; Focusing; Integrated circuit measurements; Lenses; Optical filters; Optical imaging; Optical microscopy; Spatial resolution;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 1994. IMTC/94. Conference Proceedings. 10th Anniversary. Advanced Technologies in I & M., 1994 IEEE
Conference_Location :
Hamamatsu
Print_ISBN :
0-7803-1880-3
DOI :
10.1109/IMTC.1994.352009
