DocumentCode
2339701
Title
A new technique for optical 3D measurements with a confocal scanning laser microscope
Author
Ode, Takahiro
Author_Institution
Lasertec Corp., Yokohama, Japan
fYear
1994
fDate
10-12 May 1994
Firstpage
672
Abstract
The scanning laser confocal microscope has been established as a tool for 3D measurement. However the nanometric measurement in z direction had been difficult. The new technique, combination a Miraw objective lens with a confocal microscope, opens up new surface metrology. This technique does not sacrifice any merits of confocal microscope, quick measurement, twice the bandwidth, high contrast and scatter free imaging
Keywords
light interferometry; measurement by laser beam; optical microscopes; optical microscopy; surface topography measurement; 3D measurement; Miraw objective lens; calibration; confocal scanning laser microscope; interferometer; nanometric measurement; optical 3D measurement; optical profilometer; stylus profilometer; surface metrology; z direction; Apertures; Bandwidth; Detectors; Focusing; Integrated circuit measurements; Lenses; Optical filters; Optical imaging; Optical microscopy; Spatial resolution;
fLanguage
English
Publisher
ieee
Conference_Titel
Instrumentation and Measurement Technology Conference, 1994. IMTC/94. Conference Proceedings. 10th Anniversary. Advanced Technologies in I & M., 1994 IEEE
Conference_Location
Hamamatsu
Print_ISBN
0-7803-1880-3
Type
conf
DOI
10.1109/IMTC.1994.352009
Filename
352009
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