Design of DSP-based control system for Six-axis electrostatically Suspended Micro-machined Accelerometer

Author

Qin, Yuan ; Zhang, Weiping ; Liu, Wu ; Chen, Wenyuan ; Cui, Feng ; Wan, Zhen ; Wu, Xiaosheng

Author_Institution

Nat. Key Lab. of Nano/Micro Fabrication Technol., Shanghai Jiao Tong Univ., Shanghai, China

Volume

1

fYear

2011

fDate

22-23 Oct. 2011

Firstpage

341

Lastpage

344

Abstract

Electrostatically Suspended Micro-machined Accelerometer (ESMA) is designed with a stator- mass-stator triple stack structure based on non-silicon MEMS technology. A six-axis closed-loop measurement and levitated control system for ESMA is proposed, which employs TSM320F28335 digital signal processor as the developing platform. Fuzzy PID algorithm is used in the levitated control system, and a simulation experiment in matlab is carried out. The extended AD, DA convert circuits are programmed to get 7-channel amplified signals from the device and apply 14-channel feedback voltages on corresponding electrodes. Concurrently, a controllable electrostatic force is provided by these feedback voltages to guarantee that the proof mass can suspend in the center of the cavity between electrode plates in ESMA.

Keywords

accelerometers; digital control; digital signal processing chips; fuzzy control; microsensors; three-term control; voltage control; 14-channel feedback voltage; 7-channel amplified signal; DSP-based control system; Matlab; TSM320F28335 digital signal processor; controllable electrostatic force; electrostatically suspended micromachined accelerometer; fuzzy PID algorithm; levitated control system; microelectromechanical systems; nonsilicon MEMS technology; stator-mass-stator triple stack structure; Capacitance; Sensors; DSP; Fuzzy PID; MEMS; accelerometer; electrostatic suspension;

fLanguage

English

Publisher

ieee

Conference_Titel

System Science, Engineering Design and Manufacturing Informatization (ICSEM), 2011 International Conference on

Conference_Location

Guiyang

Print_ISBN

978-1-4577-0247-1

Type

conf

DOI

10.1109/ICSSEM.2011.6081223

Filename

6081223