A new method to measure the distance between graduation lines on graduated scales

Author

Penzes, W.B. ; Allen, R.A. ; Cresswell, M.W. ; Linholm, L.W. ; Teague, E.C.

Author_Institution

Precision Eng. Div., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA

fYear

1994

fDate

10-12 May 1994

Firstpage

300

Abstract

Line scales are used throughout industry for a variety of applications. The most common is the stage micrometer, a small, graduated glass scale for the calibration of optical instruments such as microscopes. However, stage micrometers are generally not calibrated, except for critical applications, due to time and cost of optical calibration techniques. A method for calibrating line scales is presented which uses electrical test structure metrology. A description of the technique as well as examples of results from this technique are presented

Keywords

calibration; distance measurement; light interferometry; measurement standards; micrometry; optical elements; optical instruments; potentiometers; electrical test structure metrology; graduated glass scale; graduated scales; graduation lines; line scales; microscopes; optical calibration; optical instruments; stage micrometer; Calibration; Frequency; Glass; Interferometric lithography; NIST; Optical interferometry; Optical refraction; Substrates; Testing; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 1994. IMTC/94. Conference Proceedings. 10th Anniversary. Advanced Technologies in I & M., 1994 IEEE

Conference_Location

Hamamatsu

Print_ISBN

0-7803-1880-3

Type

conf

DOI

10.1109/IMTC.1994.352064

Filename

352064