Three-dimensional neuroelectronic interface for peripheral nerve stimulation and recording: realization steps and contacting technology

Author

Frieswijk, Theo A. ; Rutten, Wim L C

Author_Institution

Inst. for Biomed. Technol., Twente Univ., Enschede, Netherlands

fYear

1994

fDate

1994

Firstpage

808

Abstract

A three-dimensional array of microelectrodes for use in intraneural stimulation and recording is presented. The 128 electrodes are at the tips of silicon needles, which are electrically insulated from each other. The needles in the array have differing heights, resulting in a true three-dimensional electrode structure. The distance between the needles is 120 μm, while the heights are 600, 425 and 250 μm. An overview of the technology for the realization of the device is given, and the contacting of the array is discussed. The array is connected to a gate array (containing multiplexing electronics, current sources and buffer amplifiers) through controlled collapse chip connections

Keywords

biomedical electronics; microelectrodes; muscle; neurophysiology; 120 mum; 250 to 600 mum; 3D neuroelectronic interface; buffer amplifiers; controlled collapse chip connections; current sources; gate array; intraneural recording; intraneural stimulation; motor function restoration; multiplexing electronics; silicon needles; Chemical technology; Dielectrics and electrical insulation; Electrodes; Etching; Microelectrodes; Muscles; Needles; Nickel; Plasma applications; Silicon on insulator technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Engineering in Medicine and Biology Society, 1994. Engineering Advances: New Opportunities for Biomedical Engineers. Proceedings of the 16th Annual International Conference of the IEEE

Conference_Location

Baltimore, MD

Print_ISBN

0-7803-2050-6

Type

conf

DOI

10.1109/IEMBS.1994.415155

Filename

415155