DocumentCode
2341338
Title
The role of emissivity standards in advanced rtp
Author
Bremensdorfer, Rolf
Author_Institution
Mattson Thermal Products
fYear
2003
fDate
23-26 Sept. 2003
Firstpage
155
Lastpage
156
Keywords
Dielectric materials; Dielectric measurements; Manufacturing; Narrowband; Robustness; Silicon; Standardization; Stimulated emission; Temperature measurement; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Thermal Processing of Semiconductors, 2003. RTP 2003. 11th IEEE International Conference on
Print_ISBN
0-7803-7874-1
Type
conf
DOI
10.1109/RTP.2003.1249139
Filename
1249139
Link To Document