DocumentCode
2341749
Title
Development of a micromanipulation system for special applications in handling of microcomponents
Author
Petrovic, D. ; Chatzitheodoridis, E. ; Popovic, G. ; Haddad, G. ; Brenner, Walter ; Vujanic, A.
Author_Institution
Inst. fur Feinwektech., Tech. Univ. Wien
fYear
1998
fDate
5-7 Oct 1998
Firstpage
319
Lastpage
322
Abstract
A prototype system for handling, assembly and testing of microcomponents is described and demonstrated. The system is specially designed to fit inside the SEM chamber and operate under vacuum conditions but operation under an optical microscope, in atmospheric conditions, is also possible. The combination of servomotors and piezo-elements allow for a fast and precise positioning of the microparts at the submicron level
Keywords
micromanipulators; SEM chamber; assembly; microcomponent handling; micromanipulation system; micropart positioning; optical microscope; piezo-element; servomotor; testing; Arm; Assembly systems; Grippers; Operating systems; Optical design; Production; Scanning electron microscopy; Servomotors; System testing; Vacuum systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Devices and Microsystems, 1998. ASDAM '98. Second International Conference on
Conference_Location
Smolenice Castle
Print_ISBN
0-7803-4909-1
Type
conf
DOI
10.1109/ASDAM.1998.730225
Filename
730225
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