Rapid isothermal batch processing

Hot-wall batch thermal processing technology offers advantages of true emissivity-independent heating, excellent process uniformity and repeatability, and low cost of ownership (CoO). However, the comparatively long raw process time and queuing time associated with large-batch furnaces is contrary to the requirements of short cycle time manufacturing. In addition, there is concern that the configuration of traditional batch reactors makes it difficult to run complex chemical reactions required for deposition of advanced electronic materials, such as high-k dielectrics. This paper discusses the concept of Rapid Isothermal Batch Processing and presents TELFORMULA, an innovative isothermal hot-wall reactor that is designed to meet the needs of sub-100 nm manufacturing. Also discussed in this work are the cycle-time limiting processing sequences and methods employed in reducing the overhead time to commercially acceptable levels. Advances in component technologies are also presented which include: new ultra-fast heating element, advanced temperature control algorithms, and hardware optimizations for rapid vacuum formation and venting. Data is presented demonstrating the commercial feasibility of the TELFORMULA, along with cycle time performance and film uniformity for conventional films, such as oxides and nitrides, as well as advanced chemistries such as metal and high-k thin films.