DocumentCode
2343275
Title
Benefits of phase interference detection to IC waveform probing
Author
Block, Jeffrey A. ; Lo, W.K. ; Shaw, Chris
Author_Institution
Schlumberger SABER, San Jose, CA, USA
fYear
2001
fDate
2001
Firstpage
185
Lastpage
190
Abstract
At-speed, internal-node, backside laser-probing of flip-chip ICs using amplitude and phase-sensitive detection modes is characterized. Results show that phase-sensitive detection gives consistently higher signal quality, is less sensitive to probing conditions such as probe placement and sample drift, and can acquire waveforms at nodes difficult to probe using amplitude detection
Keywords
CMOS integrated circuits; Michelson interferometers; flip-chip devices; integrated circuit testing; light interferometry; measurement by laser beam; optical signal detection; probes; production testing; IC waveform probing; Michelson interferometer; at-speed laser-probing; backside laser-probing; flip-chip ICs; internal-node laser-probing; phase interference detection; phase interferometric detection mode; phase-sensitive detection; probe placement; signal quality; Interference; Intrusion detection; Laser beams; Laser modes; Manufacturing processes; Mirrors; Optical attenuators; Phase detection; Probes; Sun;
fLanguage
English
Publisher
ieee
Conference_Titel
Test Symposium, 2001. Proceedings. 10th Asian
Conference_Location
Kyoto
ISSN
1081-7735
Print_ISBN
0-7695-1378-6
Type
conf
DOI
10.1109/ATS.2001.990279
Filename
990279
Link To Document