DocumentCode :
2344990
Title :
Linearized control methods for piezodriven micropositioning system with nanoresolution
Author :
Yihui Wu ; Yimin Yang
Author_Institution :
Inst. of Opt. & Fine Mech., Acad. Sinica, Changchun, China
fYear :
1997
fDate :
20-20 June 1997
Firstpage :
71
Abstract :
Summary form only given. This paper discusses the linearized control methods of piezoelectrically driven micropositioning system. Weaknesses of charge control theory are expounded; chiefly, it is hard to get wide frequency band because the piezoelectric element breaks down when a high field intensity is applied to it. It is therefore proposed that harmonic linearization theory, which is more generalized than charge control theory, be used for this nonlinear problem. A graphic solution is given. Combining this with the charge control method, a control system was designed. Thus, a new way is opening up to study the basic nonlinear characteristics and to improve the dynamic performance of this kind of system. With an example, the way to obtain nanometer resolution, good linearity and dynamic characteristics was pointed out.
Keywords :
linearisation techniques; microactuators; nonlinear control systems; piezoelectric actuators; position control; charge control theory; dynamic characteristics; frequency band; harmonic linearization theory; linearized control methods; nanoresolution; nonlinear problem; piezodriven micropositioning system; Control systems; Control theory; Creep; Hysteresis; Materials science and technology; Nonlinear dynamical systems; Nonlinear optics; Optical sensors; Piezoelectric actuators; Piezoelectric materials;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Intelligent Mechatronics '97. Final Program and Abstracts., IEEE/ASME International Conference on
Conference_Location :
Tokyo, Japan
Print_ISBN :
0-7803-4080-9
Type :
conf
DOI :
10.1109/AIM.1997.652936
Filename :
652936
Link To Document :
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