Electromigration interconnect lifetime under AC and pulse DC stress

A vacancy relaxation model which predicts the DC lifetime, pulse DC lifetime, and AC lifetime for all waveforms and all frequencies above 10 kHz is proposed. The AC lifetimes of aluminum interconnect are experimentally found to be more than 10³ times larger than DC lifetime at the same current density. AC stress lifetimes have the same dependences on current magnitude and temperature, for T⩽300°C, as the DC stress lifetime