DocumentCode :
2345721
Title :
Large memory effect in oxidic thin-film transistors with a ferroelectric insulator
Author :
Prins, M.W.J. ; Cillessen, J.F.M. ; Giesbers, J.B. ; Grosse-Holz, K.-O.
Author_Institution :
Philips Res. Lab., Eindhoven, Netherlands
fYear :
1996
fDate :
26-26 June 1996
Firstpage :
76
Lastpage :
77
Abstract :
We have fabricated ferroelectric field-effect transistors of oxidic thin films, showing a memory effect with an on/off ratio of more than three orders of magnitude. The devices consist of a n-type SnO/sub 2/ semiconductor channel, a PbZr/sub 0.2/Ti/sub 0.8/O/sub 3/ layer as a ferroelectric insulator, and conducting SrRuO/sub 3/ as the gate electrode. The results demonstrate for the first time that an all-thin-film ferroelectric transistor-where the semiconductor as well as the ferroelectric insulator are deposited as thin films-can exhibit a memory effect of many orders of magnitude.
Keywords :
ferroelectric storage; ferroelectric thin films; insulated gate field effect transistors; semiconductor storage; thin film transistors; SnO/sub 2/-PbZr/sub 0.2/Ti/sub 0.8/O/sub 3/-SrRuO/sub 3/; ferroelectric field-effect transistor; ferroelectric insulator; memory effect; oxidic thin-film transistor; semiconductor channel; Dielectrics and electrical insulation; Ferroelectric materials; Hysteresis; Laboratories; Polarization; Pulsed laser deposition; Semiconductor thin films; Substrates; Thin film transistors; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Device Research Conference, 1996. Digest. 54th Annual
Conference_Location :
Santa Barbara, CA, USA
Print_ISBN :
0-7803-3358-6
Type :
conf
DOI :
10.1109/DRC.1996.546321
Filename :
546321
Link To Document :
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