DocumentCode
234578
Title
A study of MEWMA controller for drifted MIMO non-squared process
Author
Gong Qingsong ; Yang Genke ; Pan Changchun
Author_Institution
Dept. of Autom., Shanghai Jiao Tong Univ., Shanghai, China
fYear
2014
fDate
28-30 July 2014
Firstpage
2903
Lastpage
2907
Abstract
This paper studied the MEWMA controllers used to control the drifted MIMO non-squared process in semiconductor manufacturing industry. We compared the performance of the existing controllers. In order to overcome the case that existing singular matrix in the controllers, we proposed to use the Moore-Penrose inverse when matrix is not invertible. Through analysis of the stability of the controlled process, the stability condition is not relevant to what types the input takes. At last an example shows the effectiveness of our results.
Keywords
MIMO systems; feedback; matrix inversion; process control; semiconductor industry; stability; MEWMA controller; Moore-Penrose inverse matrix; drifted MIMO nonsquared process; exponentially weighted moving average controller; feedback controllers; semiconductor manufacturing industry; singular matrix; stability analysis; Asymptotic stability; Equations; MIMO; Manufacturing; Mathematical model; Process control; Stability analysis; MEWMA controller; drifted MIMO non-squared process; run-to-run control;
fLanguage
English
Publisher
ieee
Conference_Titel
Control Conference (CCC), 2014 33rd Chinese
Conference_Location
Nanjing
Type
conf
DOI
10.1109/ChiCC.2014.6897101
Filename
6897101
Link To Document