Development of detection techniques of surface defects for large aperture optical elements based on machine vision

This paper describes the status of research and development related to large-aperture optics surface damage detection based on machine vision, which is divided into online and offline systems under dark field imaging mode. The key issues about efficiency, size scaling, sub-image mosaic and adaptability are emphatically discussed in the existence of the detection system. Aiming at those existing problems, this paper outlines a prospect of the development and direction for large-aperture optical element surface damage detection.