DocumentCode :
2346307
Title :
Proceedings International Conference on Microelectronic Test Structures
fYear :
1995
fDate :
22-25 March 1995
Abstract :
The following topics were dealt with: process characterization; dimensional measurements; interconnection; SOI and material characterization; reliability; device characterization; capacitance measurements; statistics
Keywords :
integrated circuit interconnections; integrated circuit measurement; integrated circuit reliability; integrated circuit technology; integrated circuit testing; semiconductor technology; silicon-on-insulator; SOI; capacitance measurements; device characterization; dimensional measurements; interconnection; material characterization; microelectronic test structures; process characterization; reliability; statistics;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronic Test Structures, 1995. ICMTS 1995. Proceedings of the 1995 International Conference on
Conference_Location :
Nara, Japan
Print_ISBN :
0-7803-2065-4
Type :
conf
DOI :
10.1109/ICMTS.1995.513934
Filename :
513934
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2346307
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