DocumentCode
2346307
Title
Proceedings International Conference on Microelectronic Test Structures
fYear
1995
fDate
22-25 March 1995
Abstract
The following topics were dealt with: process characterization; dimensional measurements; interconnection; SOI and material characterization; reliability; device characterization; capacitance measurements; statistics
Keywords
integrated circuit interconnections; integrated circuit measurement; integrated circuit reliability; integrated circuit technology; integrated circuit testing; semiconductor technology; silicon-on-insulator; SOI; capacitance measurements; device characterization; dimensional measurements; interconnection; material characterization; microelectronic test structures; process characterization; reliability; statistics;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 1995. ICMTS 1995. Proceedings of the 1995 International Conference on
Conference_Location
Nara, Japan
Print_ISBN
0-7803-2065-4
Type
conf
DOI
10.1109/ICMTS.1995.513934
Filename
513934
Link To Document