Title :
Accurate capacitor matching measurements using floating gate test structures
Author :
Tuinhout, H.P. ; Elzinga, H. ; Brugman, J.T. ; Postma, F.
Author_Institution :
Philips Res. Lab., Eindhoven, Netherlands
Abstract :
This paper discusses a new method for characterization of matching of capacitors using the so-called floating gate capacitance measurement method. The paper explains this (DC!!) measurement method and then discusses modifications that were implemented to improve the measurement accuracy and repeatability from its original thousands of ppms (0.1 to 0.3%) to values down to 50 ppm. This improved accuracy is necessary for correct characterization of capacitor matching. The method is demonstrated with results from double-polysilicon capacitor matching measurements
Keywords :
MOS capacitors; capacitance measurement; semiconductor device testing; DC measurement; Si; capacitance measurement; capacitor matching; double-polysilicon capacitor; floating gate test structures; Capacitance measurement; Circuit testing; Field-flow fractionation; Integrated circuit measurements; MOSFET circuits; Postal services; Signal processing; Switched capacitor circuits; Time measurement; Voltage;
Conference_Titel :
Microelectronic Test Structures, 1995. ICMTS 1995. Proceedings of the 1995 International Conference on
Conference_Location :
Nara
Print_ISBN :
0-7803-2065-4
DOI :
10.1109/ICMTS.1995.513960
