• DocumentCode
    2349315
  • Title

    The electrical properties of rf sputtered tantalum oxide films

  • Author

    Choi, WK ; Ling, CH ; Sundarain, K.

  • Author_Institution
    National University of Singapore
  • fYear
    1994
  • fDate
    1994
  • Keywords
    Capacitance measurement; Capacitance-voltage characteristics; Capacitors; Current measurement; Frequency measurement; Leakage current; Pollution measurement; Sputtering; Substrates; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
  • Type

    conf

  • DOI
    10.1109/EDMS.1994.863877
  • Filename
    863877
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2349315