Title :
4E-4 Laser Interferometric Measurements and Simulations of Waves Transmitted Through the Acoustic Mirror in Thin Film BAW Resonator
Author :
Kokkonen, Kimmo ; Pensala, Tuomas
Author_Institution :
Opt. & Molecular Mater. Lab., Helsinki Univ. of Technol.
Abstract :
Acoustic wave fields excited in a 932 MHz ZnO solidly mounted BAW resonator manufactured onto a glass substrate have been studied in detail with our heterodyne laser interferometer. The glass substrate allows for optical probing directly from the bottom of the mirror stack and hence enables comparison of wave amplitudes on top of the resonator with those at the bottom of the acoustic mirror. Dispersion curves are calculated from the experimental data and compared to simulations. Transmission characteristics of the mirror stack are determined from the experimental data and compared to simulations. Furthermore, the relation between the electrical response of the device and its acoustical behavior is discussed
Keywords :
acoustic field; acoustic resonators; bulk acoustic wave devices; light interferometry; zinc compounds; 932 MHz; ZnO; acoustic mirror; acoustic wave fields; device electrical response; dispersion curves; glass substrate; heterodyne laser interferometer; laser interferometric measurements; mirror stack; optical probing; thin film BAW resonator; Acoustic measurements; Acoustic waves; Glass; Laser excitation; Mirrors; Optical interferometry; Optical resonators; Substrates; Transistors; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 2006. IEEE
Conference_Location :
Vancouver, BC
Print_ISBN :
1-4244-0201-8
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2006.123
