Fabrication of gated field emitter arrays for vacuum microtriodes

Author

Ku, T.K. ; Chen, M.S. ; Wang, C.C. ; Lee, W.F. ; Feng, M.S. ; Hsieh, I.J. ; Huang, C.M. ; Cheng, H.C.

Author_Institution

National Chiao Tung University

fYear

1994

fDate

1994

Keywords

Apertures; Chemicals; Dry etching; Fabrication; Field emitter arrays; Oxidation; Plasma temperature; Silicon; Substrates; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International

Type

DOI

10.1109/EDMS.1994.863880

Filename

863880

Link To Document