• DocumentCode
    2349382
  • Title

    The electrical and optical properties of implanted amorphous silicon

  • Author

    Wei, Jeng-Hua ; Lee, Si-Chen

  • Author_Institution
    National Taiwan University
  • fYear
    1994
  • fDate
    1994
  • Keywords
    Amorphous silicon; Annealing; Conductivity; Doping; Hydrogen; Impurities; Ion implantation; Optical films; Particle beam optics; Silicon alloys;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
  • Type

    conf

  • DOI
    10.1109/EDMS.1994.863881
  • Filename
    863881
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2349382