Title :
A new process for liquid phase deposition of silicon oxide and its application in amorphous silicon thin film transisitor
Author :
Chou, Jenq-Shuh ; Chen, Maw-Song ; Lee, Si-Chen
Author_Institution :
National Taiwan University
Keywords :
Amorphous silicon; Electrodes; Fabrication; Glass; Planarization; Semiconductor thin films; Silicon compounds; Sputtering; Temperature; Thin film transistors;
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
DOI :
10.1109/EDMS.1994.863882
