6E-1 Analysis of Highly Piezoelectric Non-Leaky SAW Propagating in Rotated Y-Cuts of Lithium Niobate with Thick Metal Films or Gratings

Author

Naumenko, Natalya ; Abbott, Benjamin

Author_Institution

Moscow Steel & Alloys Inst.

fYear

2006

fDate

2-6 Oct. 2006

Firstpage

493

Lastpage

496

Abstract

Two acoustic modes, which propagate in rotated YX-cuts of LiNbO ₃, were investigated as functions of rotation angle. The main characteristics of these modes, including polarization vectors, were determined first for free surface, and then analyzed as functions of Al thickness, in a substrate with uniform film or periodic grating. The behavior of typical Rayleigh-type and Love-type modes, which propagate in 128degYX cut, is compared with acoustic modes propagating in 15degYX cut. Velocity versus rotation angle dependences, calculated at different Al thickness, demonstrate gradual transformation of LSAW into the non-leaky SAW, with increasing Al thickness, and interaction between two SAW modes

Keywords

Love waves; Rayleigh waves; acoustic wave propagation; aluminium; lithium compounds; niobium compounds; surface acoustic waves; Al; LSAW; LiNbO₃; Love-type modes; Rayleigh-type modes; SAW modes; SAW propagation; acoustic modes; gratings; leaky surface acoustic wave; lithium niobate; polarization vectors; surface acoustic wave propagation; thick metal films; Acoustic propagation; Acoustic waves; Electrodes; Gratings; Lithium niobate; Piezoelectric films; Polarization; Propagation losses; Substrates; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2006. IEEE

Conference_Location

Vancouver, BC

ISSN

1051-0117

Print_ISBN

1-4244-0201-8

Electronic_ISBN

1051-0117

Type

conf

DOI

10.1109/ULTSYM.2006.131

Filename

4151987