Title :
Fabrication of organic polymer waveguides
Author :
Tsao, Shyh-Lin ; Her, Yue-Loong ; Wang, Way-Seen ; Wu, Jingshown
Author_Institution :
National Taiwan University
Keywords :
Embossing; High speed optical techniques; Optical device fabrication; Optical films; Optical interconnections; Optical materials; Optical polymers; Optical waveguides; Semiconductor films; Silicon;
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
DOI :
10.1109/EDMS.1994.863896
